Very High Precision Spindle
Semiconductor metrology systems builders
Very high resolution optical encoder and precision rotation allows very stable speed control.
High precision electro-optical metrology systems used for semiconductor manufacturing processes inspection.
Main features and advantages
- Smooth and precise air bearing
- Super low run-out of rotating axis to 0.25 pm
- “0” cogging electric motor design
- Clean operation meets class 2 dean-room environment standard
- Uses specially designed vacuum system to eliminate any air flow from bearing to the environment