Very High Precision Spindle

Customer:

Semiconductor metrology systems builders


Very high resolution optical encoder and precision rotation allows very stable speed control.


Used for:

High precision electro-optical metrology systems used for semiconductor manufacturing processes inspection.


Main features and advantages

  • Smooth and precise air bearing
  • Super low run-out of rotating axis to 0.25 pm
  • “0” cogging electric motor design
  • Clean operation meets class 2 dean-room environment standard
  • Uses specially designed vacuum system to eliminate any air flow from bearing to the environment